About the Laboratory EUJO-LIMMS

Desert.jpgflagge_eu.png        LOGO_EUJO.gif

     EU-Japan Opening of LIMMS

     a project between

   logo_cnrs.gif       logo_tokyouniv.gif      logo_EPFL.jpg    logo_IMTEK.jpg   logo_VTT.jpg MESA_logo.jpg MESA_logo.png

Title : EU-Japan Opening of LIMMS

Duration :  December 2011 – May 2016

Support :   European Union 7th Framework Programme for Research and Technological Development (FP7) – CAPACITIES – INCO

Funding :  2 million euros

Coordinator : CNRS- National Centre for Scientific Research, France


About EUJO-LIMMS: EU-Japan Opening of LIMMS 

is supported by the European Union 7th Framework Programme for Research and Technological Development (FP7). In 2010, within the framework of its international cooperation specific activities, the European Commission launched a call for proposals, namely INCOLAB, to establish European laboratories in third countries such as Brazil, China, India, Russia, USA, and Japan.

The strategy consists in opening the activity of the Laboratory for Integrated Micro Mechatronic Systems (LIMMS), Joint Unit between CNRS and The University of Tokyo – Institute of Industrial Science, located in Tokyo, to 3 European partners : Ecole Polytechnique Federale de Lausanne - Switzerland, Albert-Ludwigs-Universitaet Freiburg - Germany, and Valtion Teknologian Tutkimuskeskus - Finland. 

The scientific challenge of EUJO-LIMMS is to push the frontiers of micro and nano systems technology in capitalising the complementary expertise of UT and European partners. The hosted European researchers will develop joint projects for new applications in flexible electronics, optics, nanotechnology, molecular and cellular bio-engineering. 

At mid-project a call will be organised to extend the collaboration to European researchers from other Member States or Associated Countries. The proposals will be stimulated by an open workshop in Europe and the new partner will be selected by the EUJO-LIMMS consortium. The opening of the institutional arrangement of LIMMS/CNRS-UT-IIS to additional partners will be studied on the basis of the experience acquired by UT and CNRS, and on the discussions with the consortium.




EUJO-LIMMS activities are also supported by the Core-to-Core program of the Japan Society for the Promotion of Science (JSPS) granted to the University of Tokyo as a matching fund to the 7th Framework Program for Research of the European Union.

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Introduction to EUJO-LIMMS Research

Meet our EU researchers working at LIMMS in Tokyo on the video below

Video realized by CNRS Images and funded by the EU 7th Framework Programme

Project program



EUJO-LIMMS consists in 8 Work Packages

WP1 Management

The management of the project, in WP1, will be conducted by CNRS and UT-IIS. These partners  will combine their common experience in LIMMS to guaranty the smooth management of the programme and the evolution of the joint laboratory to the new European partners.

WP2 Hosting activities

The hosting activities headed by UT-IIS cover the selection of the researchers with European institutions, the official hosting and accommodation in Japan, training actions to LIMMS rules and equipment use. UT-IIS together with CNRS will extent their hosting experience to the new European researchers.


WP3 Increased cooperation with EPFL

EPFL and UT-IIS have already on-going interactions and regular joint meeting in the framework of NAMIS network. In particular, various groups have contact due to common research interests. Faculty members on both sides are motivated in formalizing the interactions and in enhancing collaboration further, in particular in areas where there is complementary expertise. Two research areas have been identified as highly interesting, but others may emerge during the collaboration: Project I: micro/nanofabrication technologies for soft-matter MEMS, and Project II: stretchable electronics. Indeed, the two institutions have already selected links between microengineering and IIS groups, involving both faculty and students.

Project EPFL/LIMMS-1: Micro/nanofabrication of soft-matter MEMS

Cooperation with Prof. Kim

Project EPFL/LIMMS-2: Stretchable electronics

Cooperation with Prof. Someya


WP4 Increased cooperation with IMTEK

For many years, IMTEK, UT-IIS and CNRS have shared a common interest in the study of cell signalling and the development of technological tools suitable for this purpose. The previous work of the project partners is complementary in several aspects, namely, the materials used by the groups, the extracellular vs. intracellular electrochemical signals being monitored, the large vs. small number of monitoring sites, the stochastic vs. deterministic cell localization. This complementarity naturally leads to two projects where the project partners’ expertise mutually enhances each other, thus helping to transcend the state of the art.

Project IMTEK/LIMMS-1:  Flexible smart intracortical neural probes

Cooperation with Prof. Takeuchi

Project IMTEK/LIMMS-2: Chip for parallel cell monitoring

Cooperation with Prof. Takeuchi


WP5 Increased cooperation with VTT

VTT and UT-IIS have been doing collaboration in various projects. In ALEBOND project, VTT’s researcher was working at UT-IIS for 19 months, whereas in PRINTO project UT-IIS researcher was doing his research at VTT’s facilities in Oulu, Finland.  From this common knowledge, best know-how, facilities, equipment and scientific interests of VTT and UT-IIS have been compared. From this in depth analysis, 3 collaborative scientific projects have emerged.

Project VTT /LIMMS-1: Chip cell with high density connected microhabitats.

Cooperation with Prof. Fujii, UT-IIS

Project VTT/LIMMS-2: Smart graphene sensor

Cooperation with Prof. Kawakatsu, UT-IIS

Project VTT /LIMMS-3: MEMS device for R2R manufacturing.

Cooperation with Prof. Toshiyoshi, UT-IIS

WP6 Dissemination

This Work Package aims at defining the communication and dissemination strategy, organizing events to disseminate the results of the project, and raising awareness on the EU‐Japan collaboration. A competitive call for tender for a 4th partner will be launched in the frame of this WP.

WP7 Opening Institutional arrangement

As a conclusion of all the work conducted as part of this preparatory Phase project, an integrative feasibility study for the institutional opening of the UMI LIMMS will be presented as the final deliverable of this WP.


WP8 Extending the cooperation to MESA+

MESA+, Institute for Nanotechnology of the University of Twente, in the Netherlands, joined EUJO-LIMMS in 2014 after a call for partner.  The aim of this work package is to start cooperation with MESA+ with two research projects.

Project MESA+/LIMMS-1: Fluidic TEM visualization of nano-vesicles and bilayer membranes 

Cooperation with Prof. Fujita and Prof. Takeuchi, UT-IIS

Project MESA+/LIMMS-2: Development of quantum-electro-optical transducers  

Cooperation with Prof. Arakawa and Prof. Hirakawa, UT-IIS


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European partners in EUJO-LIMMS bring the complementary expertise to the LIMMS, UT-IIS and CNRS to tackle challenging projects. The combinaison of EPFL unique skill in Micro/nanofabrication technology for soft-matter and UT-IIS outstanding experience in microsystems will lead to the original approach for soft matter MEMS and stretchable electronics circuits. Capitalizing on start of the art achievement of IMTEK on smart probe technology with counter part expertise of UT-IIS in high density cell chip will lead to unprecedented MEMS platform for monitoring extracellular and intracellular potentials in the central nervous system and of individual cell, respectively. VTT brings its long term vision on future application and pushes new concept in high throughput cell based drugs screening, graphene biosensor and large area roll to roll technologies. This vision perfectly meets the UT-IIS expertize in MEMS integration, to really demonstrate this new device generation.


logo_cnrs.gifCNRS  National Centre for Scientific Research, France



Founded in 1939, the CNRS is a government‐funded research organisation under the administrative authority of France's Ministry of Research. CNRS is involved in all scientific fields and its research units are spread throughout France, employing a large body of permanent researchers, engineers, technicians, and administrative staff. CNRS has an active partnership and cooperation policy with other European and International research organisations. The organisation initiates scientific collaboration projects with 93 countries, participates in 304 international programmes and 56 scientific cooperation agreements. It finally has partnerships with 102 European and International Associated Laboratories (LEA/LEI) and 20 International Joint Unit (UMI). The Laboratory for Integrated Micro Mechatronic Systems, LIMMS‐CNRS/IIS (UMI 2820) is an international laboratory performing research on micro/nanoelectromechanical systems (MEMS / NEMS) that has been founded in January 1995. This laboratory is based on a cooperation agreement shared by Institute for Engineering and Systems Sciences, National Centre for Scientific Research (CNRS‐INSIS), France and Institute of Industrial Science (IIS), the University of Tokyo, Japan.  Since April 2004, the LIMMS has become the first International Mixed Unit (UMI) of CNRS in Asia and an International Collaborative Center in IIS.


Prof. Dominique Collard, LIMMS co-director, project coordinator

Yumi Hirano, LIMMS Administrator, WP7 Leader and in charge of WP2

Dr. Laurent Jalabert , Research Engineer , in charge of WP6


logo_tokyouniv.gif  UT-IIS The University of Tokyo, Institute for Industrial Science, Japan



The Institute of Industrial Science (IIS) at the University of Tokyo is one of the largest research institute attached to university in Japan. The institute is specialized in Engineering field covering almost all the areas of expertise from applied physics, mechanics, mechanical engineering, electronics and informatics, to chemical and materials engineering, further to civil engineering and architecture. The institute consists of approximately 110 research groups headed by professors, associate professors, and lecturers, and is accommodating around 600 students studying toward their masters and PhD degrees. IIS received around 50Meuros of external funding in 2009. The major part of the funding is for the commissioned research assigned by the government on the competition basis.


Prof. Teruo Fujii, Professor of UT-IIS, DirectorGeneral of UT-IIS, LIMMS Director until Aug. 2014

Prof. Hiroyuki Fujita, Professor of UT‐IIS

Prof. Kaz Hirakawa, Professor of UT-IIS

Prof. Hideki Kawakatsu, Professor of UT-IIS, WP2 and 6 Leader, LIMMS Director since Aug. 2014

Prof. Beomjoon Kim,Professor of UT‐IIS

Prof. Shoji Takeuchi , Professor of UT-IIS, Head of Biohybrid Systems Laboratory at UT‐IIS

Prof. Hiroshi Toshiyoshi Professor of UT‐IIS

Nathalie Frances, European Project Manager


logo_EPFL.jpg  EPFL  Ecole Polytechnique Federale de Lausanne,Switzerland



EPFL (Ecole Polytechnique Fédérale de Lausanne) was founded in 1969. In 2009, EPFL was ranked first in Europe and 15th worldwide in the Shanghai ranking of engineering, technology and computer science. The past ten years have been a period of remarkable growth and development, attracting students and scientists from around the world. Recently, the Times Higher Education Supplement rated EPFL among the world’s most international campuses. Situated on the shores of Lake Geneva, surrounded by the majestic summits of the Alps, the EPFL campus is an idyllic spot where 7000 students and 3000 staff come together to study and work on the most exciting scientific and technological challenges of our time. EPFL’s teaching quality is one of the major reasons for its success. Life Sciences, environmental engineering, computer science, and materials science. 15 Bachelor’s programs and 17 Master’s programs are offered on campus. Scientific research at EPFL benefits from excellent technological infrastructures. The Center for Biomedical Imaging, for example, has state‐of‐the‐art equipment; the Center for Plasma Physics has a Tokomak reactor for studying the fusion of hydrogen atoms. With BlueGene/L supercomputer, scientists have access to one of the most powerful number crunching machines on the planet. EPFL distinguishes itself not only by the quality of its research and teaching, but also by its productive and forward‐looking technology transfer and industrial partnership activities. Each year, an average of 10 start‐ups comes to life from research in EPFL labs. Established companies, including Nokia, Alcan, Logitech and Nestlé have set up research centers on campus. At EPFL, the worlds of scientific research and business come together successfully on a daily basis.


Prof. J. Brugger, Director of Microsystems Laboratory, WP3 Leader

Prof. S. Lacour, Director of Soft Bioelectronic Interfaces Laboratory

Dr. M. Gullo, researcher in Microsystems Laboratory

Dr. F.Yesilkoy, researcher in Microsystems Laboratory

Dr. Xiao-Sheng Zhang, researcher in Microsystems Laboratory

Samuel Zimmerman, student of EPFL


logo_IMTEK.jpg  IMTEK Albert-Ludwigs-Universitaet Freiburg, Germany


The Department of Microsystems Engineering (IMTEK) at the University of Freiburg is the largest academic unit in Germany and among the largest worldwide focusing on research and education in microelectromechanical systems (MEMS). With 23 professorships it is home to a scientific and technical staff of over 300. IMTEK´s scope encompasses nearly all technical areas relevant to the interdisciplinary field of MEMS engineering, from its scientific foundations to industrial applications. Roughly 650 students are educated towards their B.Sc. and M.Sc. degrees in Microsystems Engineering and Embedded Systems Engineering, while 150 graduate students work towards the Ph.D. degree. IMTEK´s overall third party funding in 2010 amounted to over 14 M€. Two thirds of the scientific and technical projects involve industrial partners. IMTEK´s Chair for Microsystem Materials (IMTEK‐CMM), headed by Prof. Oliver Paul, is composed of a scientific and technical team of 16 core members, supported by 15 undergraduate part‐time student collaborators and B.Sc. and M.Sc. students working on their theses.


Prof. Oliver Paul, Head of IMTEK‐CMM, Professor , WP4 leader

Dr. Patrick Ruther, research scientist

Falk Barz, PhD candidate

Dr. Florian Larramendy, research scientist

Dominik Moser, research scientist


logo_VTT.jpg  VTT  Valtion Teknologian Tutkimuskeskus,Finland


  VTT Technical Research Centre of Finland  is the biggest contract research organisation in Northern Europe. VTT provides high‐end technology solutions and innovation services. From its wide knowledge base, VTT can combine different technologies, create new innovations and a substantial range of world class technologies and applied research services thus improving its clients' competitiveness and competence. VTT has both design experience and micro/nanoelectronic processing capability in a state of the art clean room.


Dr. Tommi Suni, research scientist, WP5 leader

Dr. Philippe Monnoyer, technology manager

Dr. Tapio Mäkelä, senior research scientist

Dr. Tommi Haatainen, senior research scientist

Dr. Kai Kolari, research scientist.

Mr. Markku Kainlauri, research scientist 


New partner - 2014



MESA+, Institute for Nanotechnology of the University of Twente, The Netherlands, was selected among 5 excellent competitors to become a new partner of the EUJO-LIMMS project as of April 2014, after a call launched in 2013. More information about the call



The University of Twente (founded 1961) has some 3,300 scientists and other professionals working together on cutting-edge research, innovations with real-world relevance and inspiring education for more than 9,000 students. The enterprising university encourages students to develop an entrepreneurial spirit and is a partner of Kennispark Twente. The campus is home to around 100 businesses, including student-run businesses. The University of Twente has also generated more than 700 successful spin-off companies.

Website: www.utwente.nl

The MESA+ Institute for Nanotechnology is one of the largest nanotechnology research institutes in the world. It has a unique structure, which unites scientific disciplines. MESA+ has created a perfect habitat for start-ups in the micro- and nanoindustry to settle and to mature. MESA+ is part of the University of Twente and employs 500 people of which 275 PhDs and post-docs. In the summer of 2010 the institute has moved to a newly built complex, including cleanroom, laboratories and office space. With its national NanoLab facilities the MESA+ Institute for Nanotechnology holds 1250m2 of cleanroom space and state-of-the-art research equipment, including EB pattern generation, laser interference lithography (LIL), nanoimprint lithography (NIL), EB evaporation, sputtering, focused ion beam (FIB) lithography, reactive ion etching (RIE), NMR, XPS, SEM, TEM and pulsed laser deposition (PLD). 

Website: www.utwente.nl/mesaplus

MESA+ will develop joint projects with 4 Host laboratories of the University of Tokyo: Fujita laboratoryTakeuchi laboratoryHirakawa laboratory and Arakawa laboratory


Prof. Niels TAS, Associate Professor 

Dr.Erwin J.Berenschot, Senior Engineer

Dr. Severine Le Gac, Associate Professor

Prof. Wilfred van der Wiel, Professor

Prof. dr. J.G.E Gardeniers, Professor


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Events and meetings

February 3rd, 2012 Kick-off meeting, CNRS – Paris, France

May 31st, 2012 Kick-off ceremony in Japan and Press conference, UT-IIS – Tokyo, Japan

December 12th, 2012 Information Day, EPFL – Lausanne, Switzerland - More information

December 13th, 2012 General Assembly, EPFL – Lausanne, Switzerland

December 7th to 14th, 2012 First EUJO-LIMMS Winter School at IMTEK and EPFL - More information

June 21st, 2013   Visit of Robert-Jan Smits, Director General of European Commisison DG Research and Innovation, UT-IIS, Tokyo -  See video

October 25th 2013 Workshop to prepare the call for partner, IMTEK - Freiburg, Germany - More information

June 18th, 2014 EUJO-LIMMS Information Day, VTT - Espoo, Finland - More information

January 29-30th, 2015 General Assembly and work meetings, UT-IIS - Tokyo, Japan

September 29, 2015 Final Workshop, CNRS - Paris, France - More information



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