Laurent Jalabert, Dr.

limms_Jaja.jpg Host Laboratory FUJITA LAB.
Position in LIMMS CNRS Research Engineer
Main Research Topic in LIMMS NANOTECH -  Thermal measurement platform: 3ω method  |  Active liquid-cell for mixing liquids in-situ TEM
Keywords Instrumentation, 3-omega method, Thermal conductivity  |  MEMS, liquid-cell, in-situ TEM, LDEP valve
Contact LIMMS/CNRS-IIS (UMI 2820)
Institute of Industrial Science, The University of Tokyo, 4-6-1 Komaba, Meguro-ku, Tokyo 153-8505, Japan
Phone:+81 (0)3 5452 6036 / Fax:+81 (0)3 5452 6088

E-mail

jalabert at iis.u-tokyo.ac.jp

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icon_pdf.gifAbstract2015_LJalabert1.pdf  |  icon_pdf.gifAbstract2015_LJalabert2.pdf

Resume

Laurent Jalabert is born in L'Union, France in 1974. He received the Master Degree in Physics in 1998, and the PhD degree from the University Paul Sabatier in 2001. His dissertation concerned the reliability of ultra-thin silicon dioxide and innovative gate engineering for CMOS applications. From 2001 to 2003, he joins the Laboratory for Integrated Micromechatronics Systems (LIMMS-CNRS) as JSPS Post Doctorate Fellow, hosted in Pr Masuzawa Laboratory. His research was dealing with the making of piezoresistive cantilevers for measuring the profile inside high aspect ratio micro holes made by Electro-Discharge-Machining (EDM). He got a permanent position at the INPT (Institut National Polytechnique de Toulouse) as a Research Engineer from 2004, and was hosted at LAAS-CNRS (Laboratoire d'Analyse et d'Architecture des Systemes) in Toulouse, France. His activities were focused on ICP-RIE etching at the micro-nanoscale, and Alternative Technologies like Nanoimprint Lithography and electroless. Since Octobre 2007, he joined again the LIMMS-CNRS for investigating thermal transfer in nanostructures with real time atomic observation in TEM.

Short resume :
2017 CNRS Research Engineer at LIMMS
2015-2017 CNRS Research Engineer at LAAS-CNRS
2012-2015 CNRS Research Engineer at LIMMS (permanent position).
2008-2012 LIMMS (host Lab : H. Fujita) - Research Engineer (INPT) at LIMMS - MEMS in TEM, micro-nano fabrication.
2004-2008 INPT Toulouse, working at LAAS-CNRS, Toulouse (France) - Research Engineer - plasma etching and nanoimprint (alternative technologies).
2001-2003 LIMMS (Host Lab : T. Masuzawa) - JSPS Post-Doc - Piezoresistive cantilever.
1998-2001 LAAS- PhD student - Reliability of ultra-thin SiO2 and gate engineering for MOS transistors. icon_pdf.gifThesis
1994-1998 Motorola S.A Toulouse - Operator in production - Photolithography SMARTMOS.
1992-1998 University of Toulouse, Fundamental physics and microelectronics.

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Research Projects in Limms

1-  Thermal measurement platform: 3ω method

Context :
Measuring accurately the temperature and thermal properties of a sample (solids, liquids, organic, inorganic) has become an important request in the laboratory. The 3ω method [1] that requires a metallic wire patterned on a substrate can be easily implemented in existing devices. The 3ω method is complementary to the optical TD-Thermoreflectance setup available in Nomura Lab, and constitutes a thermal measurement platform for lab members. 
Objectives & Methods :
This setup aims at being used for nanoscale thermometry from 2D thin films down to in-situ TEM atomic junction. Metallic wires are patterned on a substrate and used as micro heater and temperature sensor. Supplying AC voltage (at ω) on the heater resistance generates a small V signal proportional to the elevation of temperature ΔTh. Under some assumptions, a simplified expression of the thermal conductivity can be extracted from slope of ΔTh versus log(2ω) in the linear region. For in-plane measurement, a second metallic wire is patterned a few microns away from the heater and a second Wheatstone bridge (DC supply) is measuring the elevation of temperature resulting of thermal waves propagation (at 2ω) from the heater. 
Results :
To validate the electrical setup, the cross-plane thermal properties of a 125nm thick Si rich nitride membrane have been measured using a fully automated setup from 295K up to 400K in the frame of EUJO-LIMMS project with IMTEK. Such thin film dimension is out of the assumptions for using an analytical expression of the thermal conductivity. We are working on implementing a full 2D physical model using COMSOL simulations.

 

 

Jaja_illust_SiNmembrane.pngJaja_illust_3w_setup.png


Fig. 1 Illustrations of the SiN membrane and 3ω full setup.

Jaja_V3w_log2w.png

Fig. 2 Automated measurements of 3ω signals on the heater only.

 

References :
[1] D. Cahill. R.O Pohl, Phys.Rev.B. 35,8 (1987) and Rev.Sci.Instr. 61,802 (1990).

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2- Toward a Lab-in-a-TEM by mounting MEMS in a TEM: heat transfer, nanoscale friction, liquid-cell for bio applications
a) Nanoscale heat transfer is investigated with an original approach that consists of real-time TEM observation and MEMS devices.
Two opposing tips are fabricated using MEMS technology from an SOI substrate, and the gap between the tips is defined by Focus Ion Beam (typically ~300nm). The MEMS device is loaded in a high resolution Transmission Electron Microscope (TEM) in ultra-high vacuum conditions with a real time video acquisition. When contacting the opposing tips, it is possible to form in-situ in TEM a nanowire in between by a slow retractation process.
The obtained Si-NW is in the range of 2-20nm in diameter, and can be extented to several 100nm in length due to the plasticity of materials at this nanoscale. The real time observation provides interesting informations about the atom rearrangement until the breakdown. Electrical measurements can be performed in-situ as a function of the nanowire dimensions that are controlled by the actuator.
We are interested in studying nanoscale heat transfer on Si nanojunction. Micro heater and temperature sensor are integrated on the fixed and movable tip respectively.
The merit of this approach is to be able to form a suspended nanojunction with a length < 100nm, that is far difficult using conventional techniques. The excellent stability with time due to electrostatic actuation allowed us to control the nanojunction diameter from a formation of a neck during the elongation. We investigated nanoscale heat transfer according to the neck diameter from 38nm down to 7nm. We found that ballistic phonons might be the main carrier of thermal energy in such a small structure (L. Jalabert et al, Nanolett. 2012).
Several range of materials can be deposited by a shadow mask technique locally on the opposing tips. For studying nanosale friction phenomena, we recently studied Silver (Ag) nanowires and implement a 2D electrostatic actuator on the MEMS (see T. Sato et al, Nanotechnology 2012). 
Recently, we improved the experimental setup with implementing 1-omega Wheastone bridge for detecting variations of temperature with an accuracy of ~5mK. 
This setup was used for obtaining preliminary thermal conductivity measurement on a suspended diamond-like-carbon nanowire made in collaboration with Pr. Kometani (University of Tokyo, Hongo). 
As thermal conducitivy measurements needs to be operated in wide range of nominal temperature (typically from 1K up to 400K), we developed a prototype of TEM holder joinly with Hitachi (US and Japan) and Gatan. This holder prototype allows electrical connections on a MEMS together with the possibility to cool down the sample with liquid nitrogen. We tested this new holder on DLC nanowire. The main issue here is that due to the small volume of LN2, it is quite difficult to maintain intermediate temperature (like 200K) for several hours. Stable temperature at 90K can be maintained more easily for 4 hours since no heating compensation is needed in this case. Therefore to conduct heat transfer experiment, we decided to continuously increase the temperature of the holder while measuring the heat transferred through the DLC-NW by repeating cycles of local heating/cooling. Indeed in those non-equilibrium conditions, we could estimate the thermal conductivity. We are actually developping the 3-omega technique to get more accurate measurement on DLC-NW at least at 90K and 300K, both temperatures that are enough stable with time. 
Our final goal is to use the 3-omega to measure the atomic heat transfer in a nanojunction (metal) made in-situ in TEM, and tested with a cryogenic holder. 
b) nanoscale friction
this topic is mainly conducted by Dr. Takaaki Sato in Fujita Lab. We have implemented a double actuator that is able to move a tip in 1D to form a nanojunction, but also to slide the tip once the junction is formed. Mainly we are interested by nanoscale friction on sliver junction, that is a conventional lubricant used in industry. 
c) liquid-cell
TEM liquid-cells are developed for in-liquid observation in a Transmission Electron Microscope. In liquid observation is very challenging because of the electron beam absorption in the medium, resulting in a lack of resolution. As TEM is operating in vacuum or high vacuum, it is necessary to seal the device to avoid any leakage. The device is made of the assembly of two MEMS devices, both having a thin electron transparent nitride membrane. A spacer defines the volume of liquid that can be filled in the cavity via inlets and oulets. Before loading in TEM, the device is sealed with epoxy glue. Such kind of "passive" liquid-cell are very standard in the field. Complementary, new hardware are commercially available like TEM microfluidic holders, giving complementary observation to optical microscopy. In a way TEM can bring new insights on the static sample observed in liquid. It is still challenging to get nanoscale resolution on small sample experiencing Brownian motion in a 3D cavity. Our contribution in the field is to propose for the first time, an "active" liquid cell to replace standard "passive" ones. First demonstration was done by a former Master student (Mr. Egawa) who developed electrochemical liquid-cell for in-situ growth of gold by electrochemistry using integrated micro-electrodes. Recently, we have have developed a new liquid-cell with integrated micro-valve aiming at mixing two different liquids in-situ.

Jaja_liquidCell_Fig1.png

 

Fig. 1 Working principle of the TEM liquid-cell with LDEP valve. 

Jaja_liquidCell_Fig2.jpg

Fig. 2 Fabricated top and bottom chips before assembling.

References:

[1] N. de Jonge et al. Nat Nanotechnol 2011 Nov 23;6(11):695-704.

[2] G. Valet et al., "A new TEM liquid-cell with integrated MEMS microfluidic valve", 31st Sensor Symposium, Matsue (Japan) Oct. 20-22, 2014. 

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3- Micro-nano fabrication : embedded vertical nanosheets of inorganic materials in organic films. 
Macroelectronics consists of the integration of transistors, nanostructures and materials on flexible substrate, using low-cost, time effective techniques on large area. Recently, ultrasensitive chemical sensors or flexible solar cells have been fabricated using dry-transfer or wet-transfer of silicon nanowires on polymers like PDMS, PET, PEEK ...
However, most of the materials reported onto polymer substrate are in a planar configuration, so that the adhesion of those materials can be limited in bending conditions.
As an alternative approach to this technological problem, we have proposed to embed vertical nanosheets in the polymer, that aims at enhancing considerably the adhesion of the materials to be integrated on the polymer. Our method is versatile, that is most of the materials elaborated in the semiconductor industry can be embedded in PDMS with nanoscale resolution in width (Proc. EIPBN09, published in JVSTB 27(6) Nov/Dec 2009).
We demonstrated the embedding of thermal grown SiO2 nanosheets in PDMS that are 80nm in width, several cm in length. Also Au/SiO2/Au nanosheets were successfully embedded in PDMS and used to demonstrate the micro droplet formation and self-alignment on the hydrophilic nanosheets. Such a basic application may find interesting applications in lab-on-a-chip and flexible electronics. We have to evaluate the electrical conduction on those embedded nanosheets, that is under investigation.
The same flexible device can be also used as a flexible photomask for sub-micron photolithography using a conventional mask aligner at 405nm UV light. We succeeded in patterning 600nm nanolines on S1805 photoresist coated on a silicon wafer (MEMS 2010 hong-Kong).
Recently, I improved the process to fabricate wafer scale sub-micron patterns, either lines or apertures, in 5 seconds conventional UV exposure, without defects. Also I developed a ICP-RIE recipe that allows transferring those patterns in silicon wafer. This technique simplify a lot the previous approach since vertical nanosheets can be produced easily without the needs of sidewall oxidation and LOCOS. 
Some industrial applications are going on. 
4- MEMS : silicon nanotweezers for biomolecule manipulation
The manipulation of single biomolecules needs the fabrication of sharp tweezers with integrated electrostatic actuators and capacitive sensors. Such a multidisciplinary and complex research involve several research areas (bioMEMS, advanced MEMS, microfluidics, protein/DNA, microtubules, molecular motors ...) and need a collaborative work between MEMS engineering and bio-chemists. In this context, my contribution to this work consists of the design and fabrication of MEMS nanotweezers that will be used by my colleagues in the labs.
Several micro tweezers designs are available :
- in plane sharp opposing tips with single tip actuation (push, or push-pull) for DNA trapping (M. Kumemura). Gaps from 5mic to 50mic
- out of plane sharp opposing tip (push, or push-pull) for microtubule manipulation (MC-Tarhan). Gaps from 2 mic to 50 mic
- flat opposing tips (push) for cell capture (R. Tourvieille, EPFL). Gap of 12 mic
I developed a generic MEMS process that allows defining the gap between the tips from 100nm up to 50mic just by changing one step in the process. Such an approach is the most suitable way to answer the very wide demands from 6-7 researchers using silicon nanotweezers in the lab. 
Recently those nanotweezers have been combined with X-Ray treatment on DNA trapped between the tips, in liquid (medium). This topic, developed with the COL hospital in Lille, seeds the future of MEMS in hospital for improving cancer treatment on patients. 
5- Thermo-pnaumatic actuators for air jet micro-manipulation
This project is funded by ANR Smart Surface in which LIMMS is involved as a partner for the micro-device fabrication. Air-cushion based conveyance of micro-object on a surface is a quite old topic in Fujita Lab. First devices where fabricated and published in 2005 (Transducers 05, and JMEMS 2006) based on electrostatic actuators in arrays that were designed to orientate an air-jet flow by an automated system. We have improved the air-cushion device by introducing an hybrid Silicon-polymer membrane with thermal actuation. When applying 3V on the integrated micro heater, it generate a huge deformation of the 5mic thick polymer membrane (dimorph effect) enough large to orientate a silicon air-jet nozzle up to 7 degree (in plane displacement of 25 mic).
6- Nanogenerator using Ratchet effect in SiGe heterostructures
This project is funded by ANR Nanoterra via Pr. J.-C. Portal in which LIMMS has been recently involved as a partner for the micro-device fabrication. I am in charge of the fabrication of one part of the device from SiGe samples made in LETI (France). The other technological part is done at Georgia Tech using advanced e-beam facilities to make anti-dot network on the micro device.Finally metal annealing is done in Pr Sawano Lab in Tokyo. Tests are performed in France in Pr Portal laboratory using high magnetic fields at low temperature. More informations can be found on the BNR seminar webpage since Pr Portal gave a talk on this topic in 2010 during a visit of LIMMS lab. Pr Portal is welcoming motivated PhD and Post-doc fellow on that topic that implies many international labs (US, Japan, France, Russia).
7- Surface treatment for Liquid Dielectrophoresis (LDEP) applications
This project was started several year ago by B. Wee in Fujita Lab, and improved by M. Kumemura who demonstrated the fusion of 2 droplets for biochemical reaction in open environment. For biological application where liquid are quite conductive, LDEP is not so much appropriated because such high conductivity liquid may lead to short circuits between the parallel electrodes. Recent improvements were done by B. Daunay (experiments) and P. Lambert (theory) to find the best technological conditions that allow LOW ACTUATION VOLTAGE of HIGH CONDUCTIVE liquids. Actually, this topic is continued by R. Renaudot (PhD student at LIMMS) and V. Agache (former LIMMS member) in LETI where they developed a special insulator (SiOC silicon oxycarbide) to enhance the reliability of LDEP, that is mandatory for industrial applications. LDEP consists of 2 parallels electrodes patterned on an insulator, and covered by an insulator. To form nanodroplets, the electrodes have a special design with half disks. When applying a voltage between the electrodes, a mother droplet is elongated onto the electrodes (protrusion), and small droplets are finally formed when the voltage is switched off. We observed that the surface tension on the top layer insulator is a key parameter to form small droplets. In that way, I proposed to cover the device with a teflon like layer made by dry plasma process. It turns out that this simple deposition has enough electrical strength and quite hydrophobic properties to allow small droplets formation.

Newspaper
Microwave nanodetectors and microgenerators employ ratchet effect :
Asymmetrical motion of particles could be used to harness surrounding ambient microwaves
[link free access to nanotechweb.org archive]

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Main publication List (papers, conferences and patent)

 

2017

Journals 

  1. MC. Tarhan, R. Yokokawa, L. JalabertD. Collard, and H. Fujita, Pick-and-Place Assembly of Single Microtubules, Small, 13, vol. 32 (2017.
  2. I. Montasser, A. W. Coleman, Y. Tauran, G. Perret, L. JalabertD. Collard, B. J. Kim and M. C. Tarhan, Direct measurement of the mechanism by which magnesium specifically modifies the mechanical properties of DNA, Biomicrofluidics 11, 051102 (2017).
  3. A. Lecomte, A. Lecestre, D. Bourrier, M-C Blatché, L. JalabertE. Descamps, C. Bergaud, Deep plasma etching of Parylene C patterns for biomedical applications, Microelectronic Engineering, 177, 5, pp 70-73 (2017)
Conferences
  1. T. Baëtens, G. Perret, Y. Takayama, M. Kumemura, L. Jalabert, S. Meignan, C. Lagadec, Hiroyuki Fujita, D. Collard, M-C Tarhan, A practical single cell analysis method for mechanical characterization of cancer cells, IEEE Conf. Micro Electro Mechanical Systems (MEMS), (2017)

 

2016

Journals
  1. F. Larramendy, S. Yoshida, L. Jalabert, S. Takeuchi and O. Paul, Surface Modification for Patterned Cell Growth on Substrates with Pronounced Topographies using Sacrificial Photoresist and Parylene-C Peel-off, Journal of Micromechanics and Microengineering, Volume 26, 2016, 095017 (10pp)
  2. G. Perret, T. Lacornerie, F. Manca, S. Giordano, M. Kumemura, N. LafitteL. Jalabert, M-C Tarhan, E.F. Lartigau,F. Cleri, H. Fujita, D. Collard, "Real-time mechanical characterization of DNA degradation under therapeutic X-rays and its theoretical modeling," Microsystems & Nanoengineering, vol. 2, p. 16062, 12/05/online 2016.
  3. S. L. Karsten, M. KumemuraL. JalabertN. Lafitte, L. C. Kudo, D. Collard, et al., "Direct electrical and mechanical characterization of in situgenerated DNA between the tips of silicon nanotweezers (SNT)," Lab on a Chip, vol. 16, pp. 2099-2107, 2016
  4. M. Egawa, T. Ishida, L. Jalabert and H. Fujita, "in-situ realtime monitoring of nanoscale gold electroplating using MEMS liquid cell operating in TEM," Appl. Phys. Lett. 108 023104 (2016), DOI:10.1063/1.4939771
  5. M. TarhanN. LafitteY. TauranL. JalabertM. KumemuraG. Perret, B. Kim, A. Coleman, H. Fujita, and D. Collard, "A rapid and practical technique for real-time monitoring of biomolecular interactions using mechanical responses of macromolecules," Scientific Reports, vol. 6, p. 28001, 06/16/online 2016
Conferences
  1. G. Perret, N. Lafitte, C. M. Tarhan, L. JalabertM. Kumemura, T. Lacornerie, et al., "3D humidity imager in micro environment based on DNA conductivity and rigidity measured by Silicon Nano Tweezers," in IEEE 29th Int Conf. on Micro Electro Mechanical Systems MEMS 2016, Shanghai, China, 2016, pp. 275-278.
  2. L. Jalabert, T Sato, M Egawa, G Valet, S Volz, H Fujita, MEMS for in-situ TEM nanoscience on dry and wet samples, Nanotech France 2016 International Conference and Exhibition
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2015

 

Journals
  1. N. Lafitte, Y. Haddab, Y. Le Gorrec, H. GuillouM. KumemuraL. Jalabert, et al., "Improvement of Silicon Nanotweezers Sensitivity for Mechanical Characterization of Biomolecules Using Closed-Loop Control," Mechatronics, IEEE/ASME Transactions on, vol. 20, pp. 1418-1427, 2015.

 

Conferences
  1. F. Larramendy, D. Serien, S. Yoshida, L. Jalabert, S. Takeuchi and O. Paul, "High-topography surface functionalization based on parylene-C peel-off for patterned cell growth", The 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2015), January 18-22, 2015, Estoril (Portugal).
  2. Perret, G.; Lacornerie, T.; Manca, F.; Giordano, S.; Kumemura, M.; Lafitte, N.; Jalabert, L.; Lartigau, E.; Fujii, T.; Cleri, F.; Fujita, H.; Collard.D, In Real time mechanical characterization of DNA in liquid during a radiotherapy treatment and its theoretical analysis; The 18th International Conference on Solid-State Sensors, Actuators and Microsystems  IEEE Transducers, Anchorage, AK, USA, 21-25 June;  pp 74-76. , 2015 (final selection for best paper award)
  3. Y. Takayama, T. Ishida, T. Sato, L. Jalabert and H. Fujita, “Study of Viscous Deformation of SiO2 by Nanoscale Tensile Test under In-Situ Observation”, 27th International Microprocesses and Nanotechnology conference (MNC2014), 6C-6-2, Nov. 4-7, 2014, Fukuoka, Japan.
  4. Y. Tauran, M.C. Tarhan, N. Lafitte, L. Jalabert, B.J. Kim, H. Fujita, A.W. Coleman and D. Collard, "Silicon Nano Tweezers combined to a microfluidic device for monitoring the mechanical effects of metal cations on DNA.," in the 19th International Conference on Miniaturized Systems for Chemistry and Life Sciences,  2015 Gyeongju, Korea, 2015, pp. 1882-1884.
  5. V. Menon, L. Jalabert, M. Kumemura, H. Fujita, TOWARD REAL TIME VISUALIZATION OF DNA AND GOLD NANOPARTICLE HYBRIDIZATION EVENTS USING HEATER-INTEGRATED LIQUID CELLS IN TEM: DESIGN AND FABRICATION OF AN ACTIVE LIQUID CELL SYSTEM, センサ・マイクロマシンと応用システム」 シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], Institute of Electrical Engineers of Japan (2015)

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2014

 

Journals
  1. I. Bisotto, E.S Kannan, J-C Portal, D. Brown, T.J Beck, Y. Krupko, L. Jalabert, H. Fujita, Y. Hoshi, Y. Shiraki and T. SarayaRatchet effect study in Si/SiGe heterostructures in the presence of asymmetrical antidots for different polarizations of microwaves, Sci. Technol. Adv. Mater. 15 (2014) 045005 (7pp).
  2. R. Renaudot, Y. Fouillet, L. Jalabert, M. Kumemura, D. Collard, H. Fujita, et al., "Performances of a broad range of dielectric stacks for Liquid Dielectrophoresis transduction," Microfluidics Nanofluidics, vol. 16, pp. 620-626, 2014.
  3. R. Renaudot, Y. Fouillet, L. Jalabert, M. Kumemura, D. Collard, H. Fujita, et al., "Programmable LDEP technology to fabricate versatile master molds for PDMS continuous-flow microfluidic applications," Microfluid Nanofluid, vol. 16, pp. 701-710, 2014.
  4. N. Lafitte, Y. Haddab, Y. Le Gorrec, H. Guillou, L. Jalabert, D. Collard, et al., "Improvement of silicon nanotweezers sensitivity for mechanical characterization of biomolecules using closed- loop control," IEEE/ASME Trans. Mechatron., vol. Accepted, 2014.
  5. N. Lafitte, Y. Haddab, Y. Le Gorrec, M. Kumemura, L. Jalabert, C. Yamahata, et al., "DNA manipulation based on nanotweezers " in Enclyclopedia of nanotechnology, B. Bhusban, Ed., ed: Springer, 2014, p. (in press).
  6. D. Collard, N. Lafitte, H. Guillou, M. Kumemura, L. Jalabert, and H. Fujita, "Silicon Nano Tweezers for molecules and cells manipulation and characterization," in Emerging Tools for Micro and Nano Manipulation, X. Liu and Y. Sun, Eds., ed: Wiley-VCH, 2014, p. (in press).
Conferences
  1. G. Valet, M. Kumemura, L. Jalabert, Y. Takayama, T. Sato, H. Fujita, "A new TEM liquid-cell with integrated MEMS microfluidic valve", 31st Sensor Symposium, Matsue (Japan) Oct. 20-22, 2014. (Poster)
  2. K. Hatakeyama, E.Sarajlic, M.H. Siekman, L. Jalabert, H. Fujita, N. Tas and L. Abelmann, WAFER-SCALE FABRICATION OF SCANNING THERMAL PROBES WITH INTEGRATED METAL NANOWIRE RESISTIVE ELEMENTS FOR SENSING AND HEATING, The 27th IEEE International Conference on Micro ElectroMechanical Systems (MEMS 2014), January 26-30, 2014, San Francisco (USA) (poster). 
  3. K. Hatakeyama, E.Sarajlic, M.H. Siekman, L. Jalabert, H. Fujita, N. Tas and L. Abelmann, WAFER-SCALE FABRICATION OF SCANNING THERMAL PROBES WITH INTEGRATED METAL NANOWIRE RESISTIVE ELEMENTS FOR SENSING AND HEATING, The 27th IEEE International Conference on Micro ElectroMechanical Systems (MEMS 2014), January 26-30, 2014, San Francisco (USA) (poster). 
  4. G. Perret, T. Lacornerie, M. Kumemura, H. Guillou, L. Jalabert, E. Lartigau, T. Fujii, F. Cleri, H. Fujita, D. Collard, "Silicon nanotweezers inside liquid for the real time characterization of DNA degradation under radiotherapy treatment", E-MRS Spring meeting 2014, Symposium N, May 26-29, Lille (France).
  5. L. Jalabert, T. Sato, G. Valet, D. Guo, R. Kometani, H. Fujita and S. Volz, "Thermal conductivity of DLC nanowire", E-MRS Spring meeting 2014, Symposium D, May 26-29, Lille (France).
  6. S. Nabeya, T. Akao, Y. Takayama, T. Sato, L. Jalabert and H. Fujita, IN SITU STEM OBSERVATION OF TRIBOLOGY AND ELECTRICAL MEASUREMENT ON Ru AND RuO2 NANO CONTACT FOR PROBE-BASED DATA STORAGE, 7th Asia-Pacific Conference on Transducers and Micro/Nano Technologies (APCOT2014), 10-3 (2pages) , June 29 - July 2, 2014 / EXCO, Daegu, Korea.
  7. G. Valet, T. Sato, L. Jalabert, M. Egawa, Y. Takayama, H. Fujita, TOWARD A LAB-IN-TEM BY COMBINING APPLICATION SPECIFIC MEMS WITH TEM, 7th Asia-Pacific Conference on Transducers and Micro/Nano Technologies (APCOT2014), 10-6 (2pages) , June 29 - July 2, 2014 / EXCO, Daegu, Korea.
  8. M. Kumemura, S. L. Karsten, N. Lafitte, H. Guillou, L. Jalabert, H. Fujita, D. Collard, ELECTRICAL DETECTION OF AMPLIFIED DNA USING SILICON NANOTWEEZERS, 7th Asia-Pacific Conference on Transducers and Micro/Nano Technologies (APCOT2014), 11-3 (2pages), June 29 - July 2, 2014 / EXCO, Daegu, Korea.
  9. H. Guillou, N. Iwanaka, N. Lafitte, M. Kumemura, K. Shimizu, L. Jalabert, S. KanedaT. Fujii, H. Fujita, K. Sakata, S. Konishi, D. Collard, SILICON NANO TWEEZERS WITH FORCE/STIFFNESS/LOSSES MEASUREMENTS OF LOCAL CONTRACTILITY OF MYOCYTES, 7th Asia-Pacific Conference on Transducers and Micro/Nano Technologies (APCOT2014), 11-6 (2pages), June 29 - July 2, 2014 / EXCO, Daegu, Korea. 

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2013

 

Journals
  1. T. Sato, L. Jalabert, H. Fujita, Development of MEMS integrated into TEM setup to monitor shear deformation, force and stress for nanotribology, Microelectronic Engineering, Vol.112, Dec. 2013, 269-272, ISSN 0167-9317.
  2. R. Renaudot, V. Agache, Y. Fouillet, G. Laffite, L. Jalabert, E. Bisceglia, M. Kumemura, D. Collard and H. Fujita, "A programmable and reconfigurable microfluidic chip", Lab Chip,Lab Chip, 2013,13, 4517-4524, DOI: 10.1039/C3LC50850A
  3. R. Renaudot, T. Nguyen, Y. Fouillet, D. Jary, M. Kumemura, L. Jalabert, D. Collard, H. Fujita, V. Agache, "Alternative method for local surface functionalization using Liquid Dielectrophoresis: an application with PolyEthyleneImine polymer for bacteria trapping onto a surface", RSC Adv., 2013, DOI: 10.1039/C3RA40700D
  4. R. Renaudot, V. Agache, Y. Fouillet, M. Kumemura, L. Jalabert, D. Collard, H. Fujita, Performances of a broad range of dielectric stacks for liquid dielectrophoresis transduction, Microfluidics Nanofluidics, 2013, DOI 10.1007/s10404-013-1156-2.
  5. J. Sone, L. Jalabert, H. Fujita, Design of a Nano-displacement No-wiring Solid Actuator, Journal of Computational Science and Technology, vol7, no2, 2013. 
  6. M. Usami, T. Ishida, M. Kumemura, L. Jalabert, D. Collard, H. Fujita, Four-terminal electrical measurement of a DNA molecular bundle captured by silicon nanotweezers, IEEJ Transaction on Sensors and Micromachines, vol 133, n3, pp98-99, 2013.
  7. B. Daunay, R. Renaudot, M. Kumemura, V. Agache, L. Jalabert, D. Collard and H. Fujita, Optimized micro devices for liquid-dielectrophoresis (LDEP) actuation of conductive solutions,Sensors and Actuators B: Chemical, Volume 177, February 2013, Pages 620–626,  http://dx.doi.org/10.1016/j.snb.2012.11.049

Conferences
  1. L. Jalabert, "Conductance thermique d'une nanojonction en silicium fabriquee in-situ dans un microscope en transmission", JFR13, Maison Franco-Japonaise, Tokyo (29-12-2013) - (Best poster award). 
  2. G. Perret, T. Lacornerie, M. Kumemura, N. Lafitte, H. Guillou, L. Jalabert, E. Lartigau, T. Fuji, F. Cleri, H. Fujita, D. Collard, Real Time Biomechanical Characterization of DNA Damage under Therapeutic Radiation Beams, MRS Boston, Dec. 3rd 2013 (Oral).
  3. L. Jalabert, T. Sato, G. Valet, S. Volz, H. Fujita, "in-situ low temperature UHV-TEM nanoscience using MEMS", accepted for poster session at the 12th International Conference on Atomically Controlled Surfaces, Interfaces and Nanostructures (ACSIN-12) in conjunction with the 21st International Colloquium on Scanning Probe Microscopy (ICSPM21). http://dora.bk.tsukuba.ac.jp/event/acsin12/
  4. T. Sato, L. Jalabert, S. Nabeya, H. Fujita, In-situ Observation of Single Asperity Friction, accepted for poster session at the 12th International Conference on Atomically Controlled Surfaces, Interfaces and Nanostructures (ACSIN-12) in conjunction with the 21st International Colloquium on Scanning Probe Microscopy (ICSPM21). (oral)
  5. M. Kumemura, S. L. Karsten, N. Lafitte, H. Guillou, L. Jalabert, H. Fujita, D. Collard, Isothermal amplification of DNA on tips of silicon nanotweezers and its electrical and mechanical characterizations,  MicroTAS 2013, October 27-31, 2013, Freiburg, Germany.(oral).
  6. N. Lafitte, Y. Haddab, Y. Le GorrecH. Guillou, M. Kumemura, L. Jalabert, H. FujitaD. Collard, Closed-loop control of silicon nanotweezers for improvement of sensitivity to mechanical stiffness measurement and bio-sensing on DNA molecules, 2013 IEEE/RSJ International Conference on Intelligent Robots and Systems (Oral).
  7. H. Guillou, N. Lafitte, L. Jalabert, M. Kumemura, T. Fujii, H. Fujita, D. Collard, SILICON NANO TWEEZERS FOR EASY CELL BIOMECHANICAL MEASUREMENTS (poster), NMC 2013 Workshop, May 1-3, 2013, Stanford, CA, USA. 
  8. J. Lee, K. Yagi, M. Kumemura, T. Sato, L. Jalabert, D. Collard, H. Houjou, and H. Fujita, CHARACTERIZATION OF Π-CONJUGATED METALLOPOLYMER’S MECHANICAL STIFFNESS BY USING SILICON NANOTWEEZERS, IEEE Transducers 2013 (Oral), June, Barcelona (Spain).

  9. H. Guillou, N. Lafitte, R. Léal, L. Jalabert, T. FujiiH. Fujita, Y. T. Matsunaga, D. Collard, SILICON NANOTWEEZERS WITH DOUBLE ACTUATION AND EXTENDED STROKE FOR SINGLE CELL STUDIESIEEE Transducers 2013, June, Barcelona (Spain). 
  10. R. RenaudotY. Fouillet, VAgache, MKumemura, LJalabert, D. Collard and H. Fujita, FAST CONTINUOUS PARAFFIN WAX CHANNEL-BASED MICROFLUIDIC CHIPSFABRICATION USING LIQUID DIELECTROPHORESIS AND ELECTROWETTING (Poster), IEEE Transducers 2013, June, Barcelona (Spain).
  11. N. Lafitte, Y. Haddab, Y. Le Gorrec, H. Guillou, M. Kumemura, L. Jalabert, D. Collard and H. Fujita, ACTIVE CONTROL OF SILICON NANOTWEEZERS DETECTS ENZYMATIC REACTION AT THE MOLECULAR LEVEL (Poster), IEEE Transducers 2013, June, Barcelona (Spain). 
  12. L. Jalabert, G. Valet, A. Chorosz, D. Guo, R. Kometani, H. Guillou, T. Sato, S. Volz,H. Fujita, IMPROVED MEMS-IN-TEM SETUP FOR HIGH SENSITIVITY THERMAL CHARACTERIZATION OF NANOWIRE USING A NEW TEM CRYO-HOLDER (Poster), IEEE Transducers 2013, June, Barcelona (Spain).
  13.  T. Sato, T. Ishida, S. Nabeya, L. Jalabert, H. Fujita, MEMS combined with TEM setup for nanotribology, ISPS 2013, Santa Clara, 2013.

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2012

 

Journals
  1. L. Jalabert, T. Sato, T. Ishida, H. Fujita, Y. Chalopin, and S. Volz, Ballistic Thermal Conductance of a Lab-in-a-TEM Made Si Nanojunction, Nano Lett., 2012, 12 (10), pp 5213–5217, DOI: 10.1021/nl302379f.
  2. B. Daunay, P. Lambert, L. Jalabert, M. Kumemura, R. Renaudot, V. Agache and H. Fujita,
    Effect of Substrate Wettability in Liquid Dielectrophoresis (LDEP) Based Droplets Generation: Theoretical Analysis and Experimental Confirmation, Lab Chip, 2012, 12, 361, DOI 10.1039/C1LC20625G.
  3. E.S. Kannan, I. Bisotto, J-C. Portal, T.J. Beck, L. Jalabert, Energy free microwave based signal communication using ratchet effect, Appl. Phys. Lett. 101, 143504 (2012); [1]
  4. T. Sato, T. Ishida, L. Jalabert, H. Fujita, Real-time TEM observation of nanofriction at a single Ag asperity, Nanotechnology, 23 505701 doi:10.1088/0957-4484/23/50/505701
  5. M. Usami, T. Ishida, M. KumemuraL. JalabertD. Collard, H. Fujita, Four-Terminal Electrical Measurement of a DNA Molecular Bundle Captured by Silicon Nano Tweezers, Transaction on IEEJ, submitted. 
Conferences
  1. J. Sone, L. Jalabert, H. Fujita, Feasibility Design of Nano-Displacement Simple Solid Actuator, ICMS2012, Kobe, Japan. 
  2. D. Collard, T. Lacornerie, M. KumemuraN. LafitteH. GuillouL. Jalabert, E. Lartigau, T. Fujii, F. Cleri, H. Fujita, "SILICON NANO TWEEZERS FOR REAL TIME BIOMECHANICAL ASSAY ON DNA DAMAGE BY THERAPEUTIC RADIATION BEAMS" (Oral), MicroTAS, Okinawa, JAPAN, Oct. 28 – Nov. 1, 2012. 
  3. M. C. Tarhan, D. CollardL. JalabertM. KumemuraN. Lafitte, Q. Delouvee, S. L. Karsten and H. Fujita, "CONTINUOUS REAL-TIME MONITORING OF MOLECULAR DETECTION BY SILICON NANOTWEEZERS-INTEGRATED MICROFLUIDIC DEVICE", MicroTAS, Okinawa, JAPAN, Oct. 28 – Nov. 1, 2012.
  4. Y. TauranM. KumemuraN. Lafitte, R. Ueno, L. Jalabert, Y. Takayama, D. Collard, H. Fujita, A. W. Coleman and B-J. Kim, ‘Mechanical effect of calix[n]arene capped silver nanoparticles on DNA measured with silicon nano tweezers’, MicroTAS, Okinawa, JAPAN, Oct. 28 – Nov. 1, 2012.
  5. R. Renaudot, V. Agache, L. JalabertM. KumemuraD. Collard, H. Fujita, Performances of High-K dielectric materials (Al2O3, HfO2, ZrO2) for Liquid Dielectropphoresis (LDEP) microfluidic devices, 16th International Conference on Miniaturized Systems for Chemistry and Life Sciences (µTAS 2012), 28 Oct-1 Nov, Okinawa, Japan.
  6. R. Renaudot, Y. Fouillet, V. Agache, L. JalabertM. KumemuraD. Collard, H. Fujita, New approach for continuous based-channels microfluidic chips fabrication using EWOD and/or LDEP transductions, 8th International Meeting on Electrowetting, 21-23 June 2012, Athens, Greece. Best poster award.
  7. Adrian Martinez-Rivas, Laurent Mazenq, Laurent Jalabert, Childérick Séverac, Christophe Vieu, "Tube interconnection in polydimethylsiloxane based fluidic microchannels" (poster), MNE 2012, Toulouse.
  8. L.JalabertH.Guillou, T. Sato, T. Ishida, M. Egawa, S. Nabeya, Y. Takayama, S. Volz, H. Fujita, "Toward a Lab-in-a-TEM by mounting advanced-MEMS in TEM holder." (Oral), MNE 2012, Toulouse. 
  9. Takaaki Sato, Laurent Jalabert, Hiroyuki Fujita, "Development of MEMS integrated into TEM setup to monitor the shear deformation, force and stress for nano tribology" (Oral), MNE 2012, Toulouse. 
  10. T. Ishida, L. Jalabert, H. Fujita, In-situ observation of formation of eutectic structures between gold and silicon, (invited talk), 3rd IEEE International Workshop on Low Temperature Bonding for 3D Integration, Tokyo, May 22-23, 2012, Japan.
  11. L. Jalabert, T. Sato, T. Ishida, H. Fujita, Y. Chalopin and S. Volz, "Ballistic phonon transport in nanowires at ambient temperature" (Oral), XIV International Conference on Phonon Scattering in Condensed Matter (PHONON 2012), July 8-12, 2012 / Ann Arbor, MI USA, phonon 2012

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2011

Journals
  1. R. Mahamdi, F. Mansour, H. Bouridah, P. Temple-Boyer, E. Scheid, L. Jalabert, "Nitrogen doped silicon films heavily boron implanted for MOS structures: Simulation and characterization", Materials Science in Semiconductor Processing, In Press (2011).
  2. G. Tortissier, P. Ginet, B. Daunay, L. Jalabert , P. Lambert, B. Kim, H. Fujita and H. Toshiyoshi, CF4 plasma treatment assisted inkjet printing for color pixel flexible display, accepted in Journal of Micromechanics and Microengineering (2011).
  3. T. Sato, T. Ishida, L. Jalabert and H. Fujita, Development of MEMS-in-TEM Setup to Observe Shear Deformation for the Study of Nano-Scale Friction, Tribology Online, 6, 5 (2011) 226-229.
  4. I. Bisotto, E S Kannan, S Sassine, R Murali, T J Beck, L Jalabert and J-C Portal, Microwave based nanogenerator using the ratchet effect in Si/SiGe heterostructures, Nanotechnology 22 (2011) 245401.
Conferences
  1. B. Daunay, P. Lambert, L. Jalabert, D. Collard and H. Fujita, Optimization of liquid dielectrophoresis (L-DEP) based devices towards conductive biological liquids handling, Accepted in Transducers 2011, Beijin.
  2. Y-A. Chapuis, L. Jalabert, E. Sarajlic, D. Collard, H. Fujita, Polymer Membrane-based thermo-pneumatic actuation for distributed air-jet planar micromanipulator, Accepted as an oral presentation at IEEE Int. Conference on MEMS 2011, Cancun, Mexico.
  3. E. S. Kannan, I. Bisotto, R. Murali, T. J. Beck, L. Jalabert, K. Sawano, H. Fujita and J.-C. Portal, Electron-antidot interaction in antidot lattice with different etching parameter, The 19th international conference on Electronic Properties of Two-Dimensional Systems (EP2DS19) and the 15th conference on Modulated Semiconductor Structures (MSS 15), Tallahassee, Florida, July 25-29, 2011 website
  4. I. Bisotto, E. S. Kannan, R. Murali, T. J. Beck, L. Jalabert, K. Sawano, H. Fujita and J.-C. Portal, Ratchet photovoltage in Si/SiGe heterostructure for different antidot lattice parameters, The 19th international conference on Electronic Properties of Two-Dimensional Systems (EP2DS19) and the 15th conference on Modulated Semiconductor Structures (MSS 15), Tallahassee, Florida, July 25-29, 2011 website
  5. Sebastian Volz, Laurent Jalabert, Yann Chalopin and Hiroyuki Fujita, Thermal Conductance of Silicon Nanocontacts, Poster BB9.24, MRS Spring Meeting 2011.
  6. M. Kumemura, D. Collard, R. Tourvielle, N. Lafitte, K. Montagne, S. Yoshizawa, D. Fourmy, L. Jalabert, Y. Sakai, S. Takeuchi, T. Fujii, and H. Fujita, INTEGRATED MEMS PLATFORM WITH SILICON NANOTWEEZERS AND OPEN MICROFLUIDIC DEVICE FOR MOLECULAR AND CELLULAR BIOMECHANICAL ASSAYS, Accepted as an oral presentation at IEEE Int. Conference on MEMS 2011, Cancun, Mexico.

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2010

  1. M. Kumemura, D. Collard, R. Tourvielle, N. Lafitte, K. Montagne, S. Yoshizawa, D. Fourmy, L. Jalabert, Y. Sakai, S. Takeuchi, T. Fujii, and H. Fujita, INTEGRATED MEMS PLATFORM WITH SILICON NANOTWEEZERS AND OPEN MICROFLUIDIC DEVICE FOR MOLECULAR AND CELLULAR BIOMECHANICAL ASSAYS, Accepted as an oral presentation at IEEE Int. Conference on MEMS 2011, Cancun, Mexico.
  2. Y-A. Chapuis, L. Jalabert, E. Sarajlic, D. Collard, H. Fujita, Polymer Membrane-based thermo-pneumatic actuation for distributed air-jet planar micromanipulator, Accepted as an oral presentation at IEEE Int. Conference on MEMS 2011, Cancun, Mexico.
  3. MC. Tarhan, R. Yokokawa, L. Jalabert, D. Collard, H. Fujita, Biomotor-Based Nanotransport System Constructed by Pick-And-Place Assembly of Individual Molecule, The 2010 IEEE/RSJ International Conference on Intelligent RObots and Systems, Taipei International Convention Center, Taipei, Taiwan, October 18-22, 2010.
  4. Eric Leclerc, Jean Luc Duval, L. Jalabert (with LAAS-CNRS), Migration of liver and kidney explants inside trapezoidal PDMS microchannels, accepted for publication in Mat. Sci. Eng. C, June 2010.
  5. B. Daunay, L. Jalabert, M. Kumemura, H. Fujita, Experimental analysis of a closed/open microfluidic system for biological applications, Technical Meeting on Bio Micro Systems, IEE Japan, 2010, June 17-18, Tokyo
  6. N. Lafitte, M. Kumemura, D. Collard, S. Yoshizawa, D. Fourmy, L. Jalabert, S. Takeuchi, T. Fujii, H. Fujita, Direct bio-mechanical sensing analysis of enzymatic reactions on DNA by silicon nanotweezers, Technical Meeting on Micromachine and Sensor Systems, IEE Japan, 2010, June 17-18, Tokyo.
  7. L. Jalabert, S. Volz, L. Bouscayrol, T. Sato, T. Ishida, H. Fujita, Thermal conductance measurements in silicon nanowire using MEMS in TEM, Technical Meeting on Physical Sensors, IEE Japan, 2010, June 17-18, Tokyo.
  8. L. Jalabert, T. Ishida, T.Sato, S. Volz, H. Fujita, Nanotechnologies using MEMS in TEM, STIC-ASIA seminar, Keio University, March 15th-16th, 2010.
  9. L. Jalabert, S. Volz, T. Sato, T. Ishida, H. Fujita, Thermal Conductance Measurement of a Silicon Junction with Nanometer Scale Diameter, Accepted (oral) to the 13th International Conference on Phonon Scattering in Condensed Matter - PHONON 2010 (Taipei - Taiwan - 18-23 April 2010).
  10. M. C. Tarhan, R. Yokokawa, L. Jalabert, D. Collard and H. Fujita, Isolating Microtubules between Parallel Walls for Single Molecular Capturing Process, accepted (oral) to APCOAT 2010 (Australia).
  11. L. Jalabert, T. Sato, M.Kumemura, D. Bolsee, C. Hermans, A. BenMoussa, H.Fujita, Embedding vertical nanosheets into PDMS with a reusable template engineering, published in Proc. 23rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2010) , (2010). Conference web site
  12. M. Kumemura, D. Collard, S. Yoshizawa, D. Fourmy, N. Lafitte, L.Jalabert, S. Takeuchi, T. Fujii, H. Fujita, DIRECT BIO-MECHANICAL SENSING OF ENZYMATIC REACTION ON DNA BY SILICON NANOTWEEZERS, accepted (poster) to IEEE Int. Conf. on MEMS 2010, Hong Kong.

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2009

  1. L. Jalabert, "METHOD FOR LOCAL ETCHING OF THE SURFACE OF A SUBSTRATE", Patent - WO/2009/103907- PCT/FR2008/001820.
  2. L. Jalabert, “Integration de nanofeuillets Au/SiO2/Au dans du PDMS – Un pont technologique entre les sciences des materiaux et les polymeres fonctionnels”, Journee Francophone de la Recherche, Tokyo, 14 Novembre 2009.
  3. Laurent Jalabert, Momoko Kumemura, Celine Bottier, Hiroyuki Fujita, “Toward nanoscale functional PDMS by embedding vertical Au/SiO2/Au nanosheets for wettability enhancement.”, 22nd International Microprocesses and Nanotechnology Conference (IMNC09) in Sapporo (Japan) - oral Conference Web site.
  4. Laurent Jalabert, Momoko Kumemura, Celine Bottier, Hiroyuki Fujita, “Nanoscale surface engineering of PDMS by embedding vertical nanosheets of materials.”, Int. Conference on Micro and Nano Engineering (MNE 2009) in Ghent (Belgium) - poster Conference Web site; accepted for publication in Microelectron. Eng, 2010.
  5. Mehmet Cagatay Tarhan, Ryuji Yokokawa, Laurent Jalabert, Celine Bottier, Dominique Collard, and Hiroyuki Fujita, « KINESIN MOTION AT MICROTUBULE CROSSINGS OF A NANO TRANSPORT SYSTEM », Int. Conference on MicroTAS 2009.
  6. YA Chapuis, A Debray, L Jalabert and H Fujita, « Alternative approach in 3-D MEMS-IC integration using fluidic self-assembly techniques », Accepted for publication in J. Micromech. Microeng. - JMM/309501/PAP/132415 (2009)
  7. M. C. Tarhan, L. Jalabert, R. Yokokawa, C. Bottier, D. Collard and H. Fujita, "NANO MONORAIL FOR MOLECULAR MOTORS: INDIVIDUALLY MANIPULATED MICROTUBULES FOR KINESIN MOTION", Int Conference IEEE Transducers 2009 - oral.
  8. E. Sarajlic, C. Yamahata, M. Cordero, L. Jalabert and H. Fujita , "SINGLE MASK 3-PHASE ELECTROSTATIC ROTARY STEPPER MICROMOTOR", IEEE Transducers 2009. (SRC Award 2009).
  9. Laurent Jalabert, Tadashi Ishida, Sebastian Volz, Bernard Rousset, Emmanuel Scheid, Hiroyuki Fujita, "MEMS in TEM : THERMAL CHARACTERIZATION OF SUB-20nm NANOJUNCTION.", Conference Web Site, IEEE Transducers 2009.[download paper]
  10. Laurent Jalabert, Celine Bottier, Momoko Kumemura, Hyroyuki Fujita, "Embedded SiO2 nanosheets in PDMS using an alternative nanopatterning process.", accepted for Int. Conference EIPBN 2009. P-1H-03. J. Vac. Sci. Technol. B Volume 27, Issue 6, pp. 3055-3058 (November 2009) link to Journal
  11. Magali Brunet, Pascal Kleimann, Emmanuelle Daran, Franck Carcenac, Laurent Jalabert, Pascal Dubreuil, "High-density 3D Capacitors Based on Nanopores Etched in Silicon by Electrochemical Etching", Int. Workshop on MME 2009, Toulouse, France, to be published in Journal of Micromechanics. Microeng. 2010.
  12. C. Yamahata, E. SaraIlic, L. Jalabert, M Kumemura, D. Collard and H. Fujita , "MECHANICAL CHARACTERIZATION OF BIOMOLECULES IN LIQUID USING SILICON TWEEZERS WITH SUBNANONEWTON RESOLUTION.", Proc. IEEE Int. conference on MEMS 2009.
  13. Mahamdi, R., Saci, L., Mansour, F., Temple-Boyer, P., Scheid, E. and Jalabert, L, "Physicochemical Characterization of Annealed PolySi/NIDOS/SiO2 Structures", Spectroscopy Letters, 42:3, 167-170 (2009).
  14. R. Mahamdi, L. Saci, F. Mansour, P. Temple-Boyer, E. Scheid,L. Jalabert, "Boron diffusion and activation in polysilicon multilayer films for P+ MOS structure: Characterization and modeling", Microelectronics Journal 40 (2009) 1–4
  15. O. Desplats , P. Gallo , J.B. Doucet , G. Monier , L. Bideux , L. Jalabert, A. Arnoult , G. Lacoste, C. Armand, F. Voillot, C. Fontaine, "On the use of a O2:SF6 plasma treatment on GaAs processed surfaces for molecular beam epitaxial regrowth", Applied Surface Science 255 (2009) 3897–3901.

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2008

  1. Jalabert et al., High aspect ratio GaAs nanowires made by ICP-RIE etching using Cl2/N2 chemistry. Microelectronics Eng. vol. 85 (5-6) pp. 1173-1178 (2008)
  2. A.Larrue, O.Bouchard, L.Jalabert, A.Arnoult, A.Monmayrant, O.Gauthier-Lafaye, S.Bonnefont, F.Lozes-Dupuy, “Photonic crystal single-mode DFB laser array with precise frequency spacing”, Int. Conference CLEO/IQEC 2008, San Jose (USA), 4-9 Mai 2008.

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2007

  1. C. Amat, G. Almuneau, P. Gallo, L. Jalabert, S. Moumdji, P. Dubreuil, T. Camps, J.B. Doucet, T. Havard, V. Bardinal, C. Fontaine, A. Munoz-Yague, “Free engineering of buried oxide patterns in GaAs/AIAs epitaxial structures”. Electron Lett (2007) vol. 43 (13) pp. 730-732.
  2. S. Hernandez *, O. Bouchard, E. Scheid, E. Daran, L. Jalabert, P. Arguel, S. Bonnefont, O. Gauthier-Lafaye, F. Lozes-Dupuy, “850 nm wavelength range nanoscale resonant optical filter fabrication using standard microelectronics techniques”. Microelectron Eng (2007) vol. 84 (4) pp. 673-677.
  3. L. Jalabert, E. Daran, J.B. Doucet, F. Carcenac, P. Salles, G. Benassayag, P. Dubreuil, O. Bouchard, S. Hernandez, J. Navarro, A simplified process for high-resolution UV-NIL templates fabrication, Nanoprint Nanoimprint 2007 (NNT07), Paris, 10-12 October 2007.

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2006 - 2000

  1. C.RAI , L.JALABERT, “On the study of ICP-RIE plasma etching of Cr mask for the making of nanoimprint templates” (38pages)- Master Degree Thesis (as supervisor of C. Rai). 2006.
  2. Pourciel, J. B., Jalabert, L., Masuzawa, T., Profile and surface measurement tool for high aspect ratio microstructures, 6th International Conference on Motion and Vibration Control MOVIC 2002, Saitama, Japan, August 19-23, 2002, 2002; Saitama, Japan, 2002.
  3. Pourciel, J. B., JALABERT, L., Masuzawa, T., Profile and Surface Measurement Tool for High Aspect-ratio Microstructures. JSME International Journal Series C 2003, 46, (3), 916-922.
  4. Pourciel, J. B., Jalabert, L., Masuzawa, T, SDAPPLIN, a method for 2D profiling on high aspect-ratio microstructures. Improvement for 3D surfacing, the Japan-USA Symposium on Flexible Automation, Hiroshima, Japan, July 14-17, 2002, 2002; Hiroshima, Japan, 2002; pp 553-559.
  5. Pourciel, J. B., Jalabert, L.; Masuzawa, T.; Fujita, H., SDAPPLIN, a method for 2D profiling on high aspect ratio microstructures. Improvement for 3D surfacing, Seiken Symposium on Micro/Nano Mechatronics, Institute of Industrial Science, The University of Tokyo, Tokyo, Japan, March, 2002.
  6. F.MANSOUR , R.MAHAMDI , L.JALABERT , P.TEMPLE BOYER, “Boron diffusion into nitrogen doped silicon films for P+ polysilicon gate structures”, Thin Solid Films, Vol.434, pp.152-156, 2003
  7. P.TEMPLE BOYER , L.JALABERT , E.COUDERC , E.SCHEID , P.FADEL , B.ROUSSET, “Properties of nitrogen doped silicon films deposited by LPCVD from disilane and ammonia”, Thin Solid Films, Vol.414, N°1, pp.13-17, Juillet 2002
  8. R.MAHAMDI , F.MANSOUR , E.SCHEID , P.TEMPLE BOYER , L.JALABERT, « Boron diffusion and activation during heat treatment in heavy doped polysilicon thin films for P+ Metal-Oxide-Semiconductor transistors gates », Japanese Journal of Applied Physics, Part 1, Vol.40, N°12, pp.6723-6727, Décembre 2001
  9. L.JALABERT , P.TEMPLE BOYER , G.SARRABAYROUSE , F.CRISTIANO , B.COLOMBEAU , F.VOILLOT , C.ARMAND, « Reduction of boron penetration through thin silicon oxide with a nitrogen doped silicon layer », Microelectronics Reliability, Vol.41, N°7, pp.933-1100, Juillet 2001
  10. P.TEMPLE BOYER , L.JALABERT , L.MASAROTTO , J.L.ALAY , J.R.MORANTE, « Properties of nitrogen doped silicon films deposited by LPCVD from silane and ammonia », Journal of Vaccuum Science and Technology, Vol.A18, N°5, pp.2389-2393, Sept/Oct 2000
  11. L.JALABERT , P.TEMPLE BOYER , F.OLIVIE , G.SARRABAYROUSE , F.CRISTIANO , B.COLOMBEAU, “Relation between residual stress and electrical properties of polysicilon/oxide/silicon”, Microelectronics Reliability, Vol.40, N°4/5, pp.597-600, Avril/Mai 2000.

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