samuel_Zimmermann.jpg Host Laboratory KIM LAB.
Position in LIMMS EUJO-LIMMS Researcher (EPFL)
Main Research Topic in LIMMS

NANOTECH - Thermal Patterning of Thermoresponsive Polymers


Thermal Scanning Probe Lithography, Polymer decomposition


Institute of Industrial Science, The University of Tokyo, 4-6-1 Komaba, Meguro-ku, Tokyo 153-8505, Japan
Phone:+81 (0)3 5452 6036 / Fax:+81 (0)3 5452 6088


EPFL Ecole Polytechnique Federale de Lausanne
Institute of Microengineering, EPFL STI IMT LMIS-1, BM 3202 Station 17
CH - 1015 Lausanne, Switzerland
Direct : +41-21-693.65.73 / Sec : +41-21-693.59.01 (S. Eggli)

E-mail samuel.zimmermann at
Download icon_pdf.gifAbstract2015_SZimmermann.pdf


Short resume :
May 2014 - now PhD in Microengineering at EPF Lausanne, Switzerland, in the group of Prof. Brugger
2011-2013 B.Sc. In Material Science at ETH Zürich, Switzerland

↑Page top


Research Projects in Limms

1- Thermal Patterning of Thermoresponsive Polymers
Context :
Thermal Scanning Probe Lithography (TSPL) is a versatile technique to write features at nano to micro scale into thermosensitive resists by means of a hot atomic force microscope tip [1]. It has been shown, that this technique allows rapid prototyping of 3D structures into poly-phthalaldehyde which can be transferred into silicon [2,3]. Our aim is to improve the resolution, throughput and 3D capability of TSPL.
Objectives & Methods :
We have following objectives in this project. First to study fundamentally the decomposition dynamics of thermosensitive polymeric resists, and second use these data for further improvement of the TSPL resolution and 3D capability. To this end, we designed, fabricated, simulated and characterized dedicated microheater devices in KimLab (IIS, University of Tokyo).
Results :
In a first step we fabricated and analyzed Pt micro-heaters which can be used to characterize the thermosensitive resists in conjunction with thermal scanning probes. Figure 1 a) shows the cross-section of the microheater device (top) and the dedicated Pt micro-heater on a glass substrate (bottom). The heaters were fabricated by photolithography and lift-off.
Figure b) shows the heat distribution across the micro-heater which was measured by infrared thermal microscopy. The heating power was in the range from 90-640mW.
First results look promising and allow for further collaboration between KimLab (University of Tokyo) and Microsystems Laboratory (EPFL).

Fig. 1 Design and characterization of the platinum micro-heater. a) A cross-section sketch (top) and a sample Pt heater on glass (bottom) are shown. The red line indicates the infrared microscopy measurements across the heater. b) Infrared microscopy measurements of the heat distribution across the heater at different heating power.

References :
[1] O. Coulembier et al. Macromolecules, 43, (2010)
[2] A. W. Knoll et al. Advanced Materials, 20, (2010)
[3] H. Wolf et al. Journal of Vacuum Science & Technology B, 33, (2015)

↑Page top

Main publication List (papers, conferences and patent) 







2012 and prior



↑Page top

eujo limms