Autonomous Distributed MEMS for Micro-Smart Structure


  • Contact Researcher:
    Yves-Andre CHAPUIS, Dr.

  • Hosted LIMMS Japanese Laboratory:
    FUJITA Lab. --- Micro- and NanoElectroMechanical Systems (MEMS/NEMS)

Project Overview

  • Keywords:
    • MEMS-based distributed active surface
    • 3-D large scale integration MEMS
    • MEMS array-based Flip Chip technique
    • MEMS-based self-assembly process
  • Context:
In Fujita laboratory, we work on many aspects of micro- and nano-electro-mechanical-systems (MEMS/NEMS). This research tends to be very interdisciplinary, and we have a lot of investigations in micro- and nano-technology, but also bioengineering, computer science, and material. Especially, we study MEMS-based micro-smart structures, where we face new challenges for project as smart surface, distributed MEMS computation, advanced microactuator fabrication, and recently, innovating 3D assembling microstructures (hybrid integration by flip-chip and/or self-assembly techniques).
  • Objectives:
We focus on both theoretical and experimental, in the design, optimization, fabrication, control, modeling and application of an original design of distributed pneumatic microactuators. to achieve a reliability and durability air jet active surface for micromanipulation.
  • Methods:
First, an air jet motion surface has been developed to achieve a reliability and durability air jet active surface for micromanipulation.Different fabrications and experiment processes have been investigated, and can be resumed as follows:
  • SOI-based batch fabrication process: High production yield of 560 microactuators for 35 × 35 mm2 area has been achieved.
  • Closed-loop control: Emulation of a distributed control method, using software closed-loop controller based on imaging sensor and hardware allocation.
  • Pull-in voltage minimization: Investigation in model and experiment of microstructure sharpening process, reducing high supplied pull-in voltage of electrostatic part of microactuators.

3D assembling microstructure – To build our micro- smart-structure, we are investigating in 3D large scale array assembly. We propose a flip-chip approach, which can be combined with self-alignment and self-assembly techniques, which are getting more and more popular and promising. First results applied to our micro-structure, are given as follows:
  • Flip Chip: Using of SU8 for 3D microstructure fabrication as solder pillar array.
  • Self-alignment: Collaborating with A. Debray (Canon Inc. & Fujita Lab.) to study self-alignment technique using capillarity force of liquid.
  • Self-assembly technique: Collaborating with K. Bohringer (Associate Professor, Universty of Washinton, Seattle, U.S.) and F. Rose (LIMMS JSPS Postdoctoral fellowship) to study self-assembly techniques and their interactions with surface science for fabrication of micro- and nano-systems.

Report(s) and Publications

  • References :

International Journals

  1. Y.-A. Chapuis, L. Zhou, Y. Fukuta, Y. Mita, and H. Fujita, "FPGA-based decentralized control of arrayed MEMS for microrobotic application", IEEE Transactions on Industrial Electronics, Submitted and Awaiting Additional Reviews
  2. Y. Fukuta, Y.-A. Chapuis, Y. Mita, and H. Fujita, "Design, fabrication, and control of MEMS-based actuator arrays for air-flow distributed micromanipulation", IEEE Journal of Micro-Electro-Mechanical Systems, Vol. 15, No. 4, pp. 212-226, 2006.
  3. A. Debray, Y.-A. Chapuis, M. Shibata, and H. Fujita, "Fluidic micro-alignement applied to micro-fluidic system", IEICE Electronics Express , 3(11), pp. 227-232, 2006.icon_pdf.gifarticle
  4. Y. Fukuta, M. Yanada, A. Ino, Y. Mita, Y.-A. Chapuis, S. Konishi, and H. Fujita, "Conveyor for pneumatic two-dimensional manipulation realized by arrayed MEMS and its control", in Journal of Robotics and Mechatronics, Vol. 16, No. 2, pp. 163-170, 2004.