Design and Fabrication of enhanced RF-MEMS based microwave circuits



  • Researchers names and Co-workers:

David Dubuc, Zhang Rui, and Hiroshi Toshiyoshi
Daisuke Yamane, Kiyotaka Yamashita, Winston Sun


Project Overview

  • Keywords
    • RF-MEMS
  • Context :
The general context of this project corresponds to strong development of wireless communications induced by lots of potential applications from personal communications to health monitoring. This has translated into strong researches on the design/modelling/characterisation methodologies and also on micro-technologies to achieve microsystem with enhanced:
The objective is to both decrease the occupied volume and also to decrease the losses (induce by the length decrease) thanks to specific design techniques associated with technological developments (see previous work : [1,2]).
Reconfigurability of RF part of systems without performances losses is highly challenging and partially answered thanks to RF-MEMS devices. This nevertheless implies to develop specific design methodologies which have to consider the multi-physic aspects of RF-MEMS: mechanics of movable structures, electromagnetics to assure the targeted RF-performances, electrostatic for the actuation part of the devices, thermal to predict the behaviour under RF-power [3,4] and physic for reliability investigation [5-7].
operating frequency.
This implies to redefine both technologies and design techniques to accommodate frequencies up to millimeter-wave.
  • Objectives :
Then, the targeted project aims to take benefit from the silicon capabilities in terms of micromachining and electro-mechanical devices implementation to develop new kid of circuits exhibiting enhanced electrical properties and/or functionalities (like reconfigurability) in microwave and millimeterwave frequency range.
  • Methods :
  • References :

3D passifs circuits design
[1] 3D-BCB Based Branchline Coupler for K-band Integrated Microsystem, Minh-Nhut Do, David Dubuc, Katia Grenier, Laurent Bary, Laurent Mazenq, and Robert Plana, 2006 European Microwave Week, Manchester, UK
[2] Low Insertion Losses Broadside Coupler in a Multilayer Above IC Technology for K-band Applications, M.N. Do, D. Dubuc, K. Grenier, R. Plana, IMS 2007, Hawaii, USA
Power RF-MEMS components and circuits design
[3] Efficient design methodology of polymer based RF MEMS Switches, B. Ducarouge, D. Dubuc, S. Mellé, F. Flourens, A. Boukabache, K. Grenier, L. Bary, P. Pons, and R. Plana, 5th IEEE Topical Meeting on Silicon Monolithic Integrated Circuits in RF systems (SiRF), Atlanta (USA), 8-10 Septembre 2004, pp.298-301
[4] High Power Behavior of Capacitive RF MEMS Switches, B. Ducarouge, C. Bordas, S. Mellé, D. Dubuc, K. Grenier and R. Plana, submitted to IEEE Microwave and Wireless Components Letter
RF-MEMS reliability
[5] Reliability Modeling of Capacitive RF MEMS, Samuel Mellé, David De Conto, David Dubuc, Katia Grenier, Olivier Vendier, Jean-Luc Muraro, Jean-Louis Cazaux and Robert Plana, IEEE Transaction on Microwave theory and Techniques, vol 53, n°11, november 2005, pp 3482-3488
[6] Investigation of Dielectric degradation of Microwave Capacitive Microswitches, S.Melle, F. Flourens, P. Pons, K. Grenier, D. Dubuc and R. Plana, Y.Segui, J.LMuraro, 17th IEEE International Conference on Micro Electro Mechanical Systems(MEMS'2004), Maastricht (Pays-Bas), 25-29 Janvier 2004, pp.141-144
[7] Carbon Nanotube Based Dielectric for Enhanced RF MEMS Reliability, Chloé Bordas, Katia Grenier, David Dubuc, Emmanuel Flahaut, Sébastien Pacchini, Mathieu Paillard and Jean-Louis Cazaux, IMS 2007, Hawaii, USA